JPH0132045Y2 - - Google Patents
Info
- Publication number
- JPH0132045Y2 JPH0132045Y2 JP1986047300U JP4730086U JPH0132045Y2 JP H0132045 Y2 JPH0132045 Y2 JP H0132045Y2 JP 1986047300 U JP1986047300 U JP 1986047300U JP 4730086 U JP4730086 U JP 4730086U JP H0132045 Y2 JPH0132045 Y2 JP H0132045Y2
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- pattern
- marks
- alignment marks
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986047300U JPH0132045Y2 (en]) | 1986-03-31 | 1986-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986047300U JPH0132045Y2 (en]) | 1986-03-31 | 1986-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62158449U JPS62158449U (en]) | 1987-10-08 |
| JPH0132045Y2 true JPH0132045Y2 (en]) | 1989-10-02 |
Family
ID=30867775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986047300U Expired JPH0132045Y2 (en]) | 1986-03-31 | 1986-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0132045Y2 (en]) |
-
1986
- 1986-03-31 JP JP1986047300U patent/JPH0132045Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62158449U (en]) | 1987-10-08 |
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